PTFE PFA Inline Chemical Heater Solvent Heaters For Wet Processing Equipment

Liquid level sensor

• Ground wire options

• Over-temperature thermocouple

• Process thermocouple

• TIH Series Applications Include:

  Faster heatup: Single heater chamber sizes up to 18kW.

  Rapid installation: Customized plumbing connections

  Long heater life for reduced cost of ownership (COO):

  Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.

  Long heater life and clean operating: Patented heater gas purge system continuously removes chemical permeation and ensures exceptionally long element life. This system also protects against any potential ionic contamination of the chemistry.

  Rugged construction: Thick walled chamber provides long service life in the harshest high temperature applications.

  Exceptionally clean performance: Thick fluoropolymersheath minimizes permeation. Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

  Outstanding chemical compatibility: All fluoropolymerwetted parts compatible with virtually any chemistry.

  Excellent temperature stability: Low watt density design enables accurate control of process temperature.

  TIH Series Applications Include:

  SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2 )

  SC2: hydrochlorice acid (HCl) and hydrogen peroxide Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonim fluoride (NH4F)

  Nitride etch/strip: phosphoric acid (H3PO4)Various acids such as:

  Hydrochloric (HCl)

  Hydrofluoric (HF)

  Acetic (C2H4O2)

  Nitric (HNO3)

  Sulfuric (H2SO4)

  Sulfuric acid and hydrogen peroxide

  Sulfuric acid and ozone (O3)

  Hydrofluoric acid and glycol (C2H6O2)

  Potassium hydroxide (KOH)

  Sodium hydroxide (NaOH)

  Electroless nickel

  Electroless copper

  Electroless gold

  Deionized water

  Some solvents (consult factory)