210C Inline Chemical Heater Unmatched Semiconductor Process Inline Fluid Heater

Benefits and Specifications

• Unmatched heating of semiconductor process fluids upto 210°C.

• Patented heater gas purge system ensures long element life and reduced cost of ownership.

• Thick walled chamber provides long service life in the harshest high temperature applications.

• Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

• All fluoropolymer wetted parts provide outstandingcompatibility with virtually any chemistry.

• Low watt density design enables precise and stable control of process temperature.

• PVDF high temperature mounting brackets (Hightemperature model)

• Options:

• Horizontally mounted configuration

• Integral cooling coils

• 100 ohm RTDs or “J”, “K”, or “E” type process and

  element thermocouples

• Lower watt density heaters for special applications

Specifications:

Service:
• Inline chemical heater with all fluoropolymer wetted

surfaces for virtually any wet chemistry application.

Temperature Range: Up to 210°C.

Maximum Working Pressure:

• 100 PSIG (7 Bar) at 25oC

• 43 PSIG (. Bar) at 180oC

Heater Sizes: 1,000 watts up to 18,000 watts

Heater Voltages Available:
• 200 to 600 volts, single or three phase (12kW and

larger requires three phase).

Watt Density: 10 watts per square inch (1.5w/cm2)

Fluid Connections Available:
• 1⁄4” (6mm) to 1” (25mm) flared
• 1⁄2” (12mm) to 1” (25mm) Super 300 Type Pillar®•

Other connections available, consult factory

Third Party Certificatons: CE, UL, Semi S2 and S3

Element Purge:
• Small amount of clean dry air (CDA) or N2 gas flows

between the metal grounded element and the PTFE sheath